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Translation-reduced ion beam figuring.

Lin Zhou, Yifan Dai, Xuhui Xie

|April 4, 2015

Summary

This summary is machine-generated.

A new translation-reduced ion beam figuring (TRIBF) technique enables processing of large components using five-axis ion beam figuring (IBF) plants. This method significantly reduces surface errors on large optics, proving effective for advanced manufacturing.

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Area of Science:

Optics and Materials Science
Precision Engineering
Manufacturing Technology

Background:

Traditional five-axis ion beam figuring (IBF) is limited in processing large components.
Large optics require advanced manufacturing techniques for high-precision surface finishing.

Purpose of the Study:

To introduce a novel translation-reduced ion beam figuring (TRIBF) technique.
To enhance the capability of five-axis IBF plants for processing large components.
To validate the TRIBF technique through experimental verification.

Main Methods:

Developed a translation-reduced ion beam figuring (TRIBF) technique for five-axis IBF systems.
Established the IBF kinematic model and solved motion parameters for TRIBF.
Conducted experiments on a 150 mm diameter planar mirror using a limited 100 mm translation stage.

Main Results:

Successfully processed a 150 mm planar mirror using the TRIBF technique.
Reduced surface error from 10.7 nm root mean square (rms) to 1.3 nm rms.
Achieved this precision surface correction within a 97-minute processing time.

Conclusions:

The translation-reduced ion beam figuring (TRIBF) technique is feasible and effective for large component processing.
TRIBF enhances the utility of existing five-axis IBF plants by leveraging rotation axes.
This method offers a viable solution for high-precision finishing of large optical components.