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Updated: Apr 14, 2026

Miniaturized Sample Preparation for Transmission Electron Microscopy
Published on: July 27, 2018
Contamination mitigation strategies for scanning transmission electron microscopy.
1Electron Microscopy Centre, Australian Institute for Innovative Materials, Innovation Campus, University of Wollongong, North Wollongong, NSW 2500, Australia.
Specimen cleanliness is crucial for high-magnification scanning transmission electron microscopy (STEM). Beam showering and plasma cleaning are effective methods for preparing contamination-free specimens for atomic-scale imaging.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Modern aberration-corrected scanning transmission electron microscopy (STEM) achieves atomic resolution.
- High electron fluxes in STEM can lead to significant specimen contamination.
- Specimen cleanliness is critical for accurate high-magnification STEM imaging and microanalysis.
Purpose of the Study:
- To quantitatively assess the effectiveness of various specimen cleaning methods for high-magnification STEM.
- To identify optimal cleaning strategies for different specimen types and sensitivities.
Main Methods:
- Quantitative measurement of contamination rates.
- Application and evaluation of baking, cooling, plasma cleaning, beam showering, and UV/ozone exposure.
- Testing methods on various specimen types.
Main Results:
- Beam showering is rapid, convenient, and highly effective across a broad range of specimens.
- Oxidative plasma cleaning is also effective, particularly for specimens on carbon supports.
- Cooling is a suitable method for electron beam-sensitive materials.
Conclusions:
- A combination of preliminary cleaning (baking or plasma) followed by beam showering yields contamination-free specimens.
- Effective specimen cleaning is essential for reliable atomic-scale imaging and analysis in high-flux STEM.
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