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Updated: Apr 14, 2026

Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
Published on: January 19, 2020
Gaëlle Piret1, Clément Hébert2, Jean-Paul Mazellier3
1INSERM, UA01, Clinatec Laboratory, Biomedical Research Center Edmond J. Safra, F-38 000 Grenoble, France; Université Grenoble Alpes, UA01, Clinatec Laboratory, Biomedical Research Center Edmond J. Safra, F-38 000 Grenoble, France; CEA, LETI, Clinatec, F-38000 Grenoble, France.
Boron-doped diamond (BDD) microelectrodes show promise for neural implants. These 3D-nanostructured BDD electrodes support neural cell growth and enable high-fidelity recording of neural activity.
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