A resonant pressure microsensor capable of self-temperature compensation.

Area of Science:

• MEMS technology
• Sensor systems
• Metrology

Background:

• Resonant pressure microsensors offer quasi-digital output and stability for aerospace and atmospheric monitoring.
• Conventional microsensors require additional temperature sensors for compensation, increasing complexity and cost.

Purpose of the Study:

• To develop a resonant pressure microsensor with integrated self-temperature compensation capabilities.
• To eliminate the need for external temperature sensors in pressure measurement systems.

Main Methods:

• Designed a microsensor with two doubly-clamped "H" type resonant beams on a pressure diaphragm for differential output.
• Calibrated intrinsic resonant frequencies across various pressure and temperature conditions.
• Developed functions correlating resonant frequencies to temperature and pressure for compensation.

Main Results:

• Achieved self-temperature compensation without external sensors.
• Reduced maximal pressure measurement errors from over 1.5% to less than 0.01% (full scale).
• Demonstrated effectiveness across a temperature range of -40 °C to 70 °C and pressure range of 50 kPa to 110 kPa.

Conclusions:

• The developed resonant pressure microsensor effectively addresses temperature-induced frequency shifts.
• Self-compensating microsensors offer superior accuracy and simplified system design for pressure monitoring applications.