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A Silicon Resonant Pressure Microsensor Based on Frequency-Ratio Measurement for High-Temperature Applications.

Zhaoyuan Tan1,2, Pengxiang Ye1,2, Xiaohan Liu1,2

  • 1State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

Micromachines
|March 28, 2026
PubMed
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This study introduces a novel silicon resonant pressure microsensor for extreme downhole conditions. Its unique design ensures stable, high-precision pressure monitoring up to 175 °C and 175 MPa.

Area of Science:

  • Materials Science
  • Microelectromechanical Systems (MEMS)

Background:

  • Deep well drilling and petroleum exploration require robust pressure sensors for extreme temperatures and pressures.
  • Conventional diaphragm-based sensors face limitations in balancing pressure range and sensitivity at high temperatures.

Purpose of the Study:

  • To develop a high-temperature silicon resonant pressure microsensor for reliable operation in deep well environments.
  • To enhance pressure range and sensitivity using an innovative force-transmission structure.
  • To implement a frequency-ratio measurement scheme for accurate readings independent of external oscillator stability.

Main Methods:

  • Fabrication of a silicon resonant pressure microsensor incorporating V-shaped micro-beam supports.
  • Utilizing a frequency-ratio measurement scheme with a dedicated pressure-insensitive reference resonator.
Keywords:
frequency measurementhigh-temperature and high-pressuremicroelectromechanical systemresonant pressure sensor

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  • Experimental validation of sensor performance at high temperatures (up to 175 °C) and pressures (up to 175 MPa).

    • Main Results:

    • The microsensor demonstrated stable operation at 175 °C and 175 MPa.
    • The V-shaped micro-beam supports effectively converted compressive stress to tensile stress, enhancing pressure resistance and sensitivity.
    • The frequency-ratio scheme achieved measurement accuracy better than 0.02% FS at 125 °C, even with a low-stability oscillator.

    Conclusions:

    • The developed silicon resonant pressure microsensor offers a promising solution for high-precision pressure sensing in extreme downhole conditions.
    • The innovative design and measurement scheme overcome limitations of conventional sensors, enabling reliable performance.
    • This technology addresses critical needs in the oil and gas industry for enhanced exploration and extraction efficiency.