Nanometer-scale displacement measurement with high resolution using dual cavity Fabry-Pérot interferometer for...

A sensor of a biomimetic robot has to measure very small environmental changes such as, nanometer scale strains or displacements. Fiber optic sensor can be also one of candidates for the biomimetic sensor because the sensor is like thread and the shape of the sensor is similar to muscle fiber. A fiber optic interferometer, which is an optical-based sensor, can measure displacement precisely, so such device has been widely studied for the measurement of displacement on a nanometer-scale. Especially, a Quadrature Phase-Shifted Fiber Fabry-Pérot interferometer (QPS-FFPI) uses phase-information for this measurement, allowing it to provide a precision result with high resolution. In theory, the QPS-FFPI generates two sinusoidal signals of which the phase difference should be 90 degrees for the exact measurement of the displacement. In order to guarantee the condition of the phase difference, the relative adjustment of the cavities of the optical fibers is required. However, with such precise adjustment it is very hard to fix the proper difference of the two cavities for quadrature-phase-shifting. In this paper, a dual-cavity FFPI is newly proposed to measure the displacement on a nanometer-scale with a specific type of signal processing. In the signal processing, a novel phase-compensation algorithm is applied to force the phase difference to be exactly 90 degrees without any physical adjustment. As a result, the paper shows that the phase-compensated dual-cavity FFPI can effectively measure nanometer-scale displacement with high resolution under dynamic conditions.