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Optical frequency comb profilometry using a single-pixel camera composed of digital micromirror devices.

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    This study introduces an optical frequency comb profilometer using a single-pixel camera for precise surface measurement. It achieves high axial resolution and dynamic range without phase ambiguity, enabling detailed surface profiling.

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    Area of Science:

    • Optics and Photonics
    • Metrology
    • Surface Science

    Background:

    • Traditional profilometry methods often face limitations such as 2π phase ambiguity and limited axial dynamic range.
    • Measuring surfaces that exceed the wavelength of light requires advanced techniques to ensure accuracy.

    Purpose of the Study:

    • To develop and demonstrate an optical frequency comb profilometer utilizing a single-pixel camera.
    • To overcome the limitations of 2π phase ambiguity in surface profile measurements.
    • To enhance the axial resolution and dynamic range of profilometry.

    Main Methods:

    • Implementation of an optical frequency comb profilometer.
    • Integration of a single-pixel camera for surface profile acquisition.
    • Utilizing digital micromirror devices (DMDs) with high modulation contrast.

    Main Results:

    • Achieved an axial resolution of 3.4 μm at 1 GHz operation (30 cm wavelength).
    • Extended the axial dynamic range to 0.87×10⁵.
    • Demonstrated improved measurement accuracy attributed to higher DMD modulation contrast.
    • Increased the system's frame rate to 20 Hz.

    Conclusions:

    • The developed optical frequency comb profilometer effectively measures surface position and profile beyond the light wavelength without 2π phase ambiguity.
    • The use of a single-pixel camera and high-contrast DMDs significantly enhances resolution and dynamic range.
    • The system offers a promising advancement for high-precision surface metrology applications.