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Error analysis for a laser differential confocal radius measurement system.

Xu Wang, Lirong Qiu, Weiqian Zhao

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    |May 14, 2015
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    Summary
    This summary is machine-generated.

    A new error compensation model significantly improves the accuracy of laser differential confocal radius measurement systems (DCRMS). This advancement reduces measurement uncertainty for radius of curvature, enhancing precision in optical metrology.

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    Area of Science:

    • Optical Metrology
    • Precision Engineering
    • Laser Measurement Systems

    Background:

    • Previous laser differential confocal radius measurement systems (DCRMS) required further accuracy improvements.
    • Identified key error sources impacting radius of curvature measurements.

    Purpose of the Study:

    • To develop an error compensation model for DCRMS.
    • To enhance the measurement accuracy of radius of curvature.

    Main Methods:

    • Analyzed error sources: laser offset, test sphere position, sphere figure, and motion errors.
    • Established a DCRMS error compensation model based on theoretical analysis.
    • Validated the model through experimental testing.

    Main Results:

    • The expanded uncertainty of the DCRMS was reduced to U=0.13 μm + 0.9 ppm·R (k=2).
    • Demonstrated significant improvement in measurement accuracy for radius of curvature.

    Conclusions:

    • The developed error compensation model effectively enhances DCRMS accuracy.
    • Provides a theoretical foundation for future improvements in DCRMS precision.
    • Applicable to high-precision optical component metrology.