High-speed high-precision and ultralong-range complex spectral domain dimensional metrology

A precise, nondestructive dimensional metrological system is crucial to manufacturing and packaging of multi-component optical system. To this end, an orthogonal dispersive spectrometer based complex spectral domain interferometric system for high-speed high-precision and ultralong-range dimensional metrology is developed. An improved complex method based on actual spectral phase shift is proposed to achieve ultrahigh suppression of artifacts. Suppression ratios of 80 dB for DC and 60 dB for mirror images are realized, the highest ratios among existing complex methods. To ensure high-precision in distance determination, an averaged spectral phase measurement algorithm is adopted. A precision of 60 nm within a measurement range of 200 mm without axial movement of the sample is demonstrated. The measurement range is readily extendable if axial movement of the sample and range cascading are involved. The system holds potential applications in various areas for real-time nondestructive testing and evaluation.