Micro electro-mechanical system piezoelectric cantilever array for a broadband vibration energy harvester

Limited energy sources of ubiquitous sensor networks (USNs) such as fuel cells and batteries have grave drawbacks such as the need for replacements and re-charging owing to their short durability and environmental pollution. Energy harvesting which is converting environmental mechanical vibration into electrical energy has been researched with some piezoelectric materials and various cantilever designs to increase the efficiency of energy-harvesting devices. In this study, we focused on an energy-harvesting cantilever with a broadband vibration frequency. We fabricated a lead zirconate titanate (PZT) cantilever array with various Si proof masses on small beams (5.5 mm x 0.5 mm x 0.5 mm). We obtained broadband resonant frequencies ranging between 127 Hz and 136 Hz using a micro electro-mechanical system (MEMS) process. In order to obtain broadband resonant characteristics, the cantilever array was comprised of six cantilevers with different resonant frequencies. We obtained an output power of about 2.461 μW at an acceleration of 0.23 g and a resistance of 4 kΩ. The measured bandwidth of the resonant frequency was approximately 9 Hz (127-136 Hz), which is about six times wider than the bandwidth of a single cantilever.