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Updated: Apr 12, 2026

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Published on: September 14, 2017
Characterization of nanostructured ZnO thin films deposited through vacuum evaporation
Jose Alberto Alvarado1, Arturo Maldonado2, Héctor Juarez3
1Centro de Investigaciones y de Estudios Avanzados del Instituto Politecnico Nacional, programa de Nanociencias y Nanotecnología, Av. Instituto Politécnico Nacional # 2508, Col. San Pedro Zacatenco, C.P. 07360, México, D. F., México.
Abstract:
This work presents a novel technique to deposit ZnO thin films through a metal vacuum evaporation technique using colloidal nanoparticles (average size of 30 nm), which were synthesized by our research group, as source. These thin films had a thickness between 45 and 123 nm as measured by profilometry. XRD patterns of the deposited thin films were obtained. According to the HRSEM micrographs worm-shaped nanostructures are observed in samples annealed at 600 °C and this characteristic disappears as the annealing temperature increases. The films obtained were annealed from 25 to 1000 °C, showing a gradual increase in transmittance spectra up to 85%. The optical band gaps obtained for these films are about 3.22 eV. The PL measurement shows an emission in the red and in the violet region and there is a correlation with the annealing process.
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