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High Vertical Resolution Full-Field Reflection-Type Three-Dimensional Angle-Deviation Microscope with Nonlinear Error

Ming-Hung Chiu1, Chen-Tai Tan1, Shih-Feng Huang1

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Summary
This summary is machine-generated.

This study introduces a reflectivity-height transformation for angle-deviation microscopes (ADM) to create 3D surface profiles. The method enables rapid, high-resolution defect detection on various surfaces.

Keywords:
angle-deviation microscopecharge-coupled device (CCD)critical angleoptical microscopethree dimensional (3D)

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Area of Science:

  • Optical Metrology
  • Surface Profilometry
  • Microscopy

Background:

  • Full-field angle-deviation microscopes (ADM) offer advanced imaging capabilities.
  • Accurate 3D surface profiling is crucial for defect detection and material analysis.
  • Existing methods may have limitations in resolution or speed.

Purpose of the Study:

  • To investigate the application of reflectivity-height transformation in ADM for 3D surface profiling.
  • To enhance the capabilities of ADM for high-resolution, full-field 3D measurements.
  • To enable rapid detection of surface defects using ADM.

Main Methods:

  • Acquiring two light intensity images (total internal reflection and critical angle) using charge-coupled devices (CCDs).
  • Converting intensity images into a reflectivity profile and then an angle of deviation matrix.
  • Utilizing triangular geometrical relationships to determine surface height and generate 3D profiles.

Main Results:

  • Achieved high optical magnification (>250x) for submicron measurements with nanometer vertical resolution.
  • Enabled simultaneous acquisition of 2D and 3D images.
  • Demonstrated rapid detection of small defects on both transparent and non-transparent surfaces.

Conclusions:

  • Reflectivity-height transformation is effective for full-field 3D surface profiling with ADM.
  • The developed method provides high resolution and speed for defect detection.
  • ADM with this transformation offers a powerful tool for surface analysis and quality control.