Fabrication of PMMA nanofluidic electrochemical chips with integrated microelectrodes

A novel method based on plasma etching was proposed for monolithically integrating planar nanochannels and microelectrodes on a poly (methyl methacrylate) (PMMA) plate, and complete PMMA nanofluidic electrochemical chips with integrated microelectrodes were constructed by bonding with another PMMA plate containing microchannels. The fabrication sequences of nanochannels and microelectrodes were optimized. The oxygen plasma etching rate of PMMA nanochannels was studied, and the average rate was 15 nm/min under optimal conditions. An UV-ozone assisted thermal bonding method was developed to realize a low-temperature chip bonding, and the variations in width and depth of nanochannels before and after bonding were 2% and 5%, respectively. As a demonstration, a nanoparticle crystal (NPC)-based nanofluidic biosensor with integrated Ag microelectrodes was designed and fabricated. Sub-microchannel arrays with a depth of 400 nm and a width of 30 μm on the biosensor functioned as filters, and trapped 540 nm silica nanoparticles modified with streptavidin inside the connected microchannel to assemble the NPC. The interspaces in the NPC formed a three-dimensional nanochannel network with an equivalent diameter of 81 nm. By measuring the conductance across the NPC, a high quality nanofluidic sensing of biotin was achieved. The limit of detection was 1 aM, and the detection range was from 1 aM to 0.1 nM.