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Updated: Apr 11, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium

Published on: December 16, 2011

Single-Step Soft-Imprinted Large-Area Nanopatterned Antireflection Coating.

Jorik van de Groep¹, Pierpaolo Spinelli^1,2, Albert Polman¹

¹†Center for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands.

|May 27, 2015

Summary

This study presents a novel nanopatterned antireflection coating using sol-gel and soft-imprint technology. The developed nanoglass coating significantly reduces reflection on glass surfaces, enhancing optoelectronic device performance.

Keywords:

Antireflection coating hydrophobicity nanoimprint lithography nanopattern

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Published on: July 1, 2018

Area of Science:

Materials Science
Nanotechnology
Optics

Background:

Traditional antireflection coatings often require complex fabrication processes.
Achieving broad spectral and angular antireflection properties remains a challenge.
Developing cost-effective and scalable methods for nanostructured surfaces is crucial.

Purpose of the Study:

To demonstrate an effective nanopatterned antireflection coating on glass using sol-gel chemistry and soft-imprint technology.
To characterize the optical performance, including reflection reduction and angular dependence.
To explore the potential applications in optoelectronic devices.

Main Methods:

Sol-gel chemistry for silica precursor synthesis.
Large-area substrate-conformal soft-imprint technology for nanopatterning.
Characterization of nanostructure geometry, refractive index, and optical reflectance.

Main Results:

Fabrication of 120 nm tall silica nanocylinders with specific dimensions and pitch.
Reduction of double-sided reflection from 7.35% to 0.57% over the visible spectrum.
Achieved minimum reflectance <0.05% at 590 nm with tunable effective refractive index (1.002 < n < 1.44).
Demonstrated glare elimination on smartphone displays and improved solar cell efficiency.
Effective performance over a wide angular range (±50°) with inherent hydrophobicity and mechanical durability.

Conclusions:

Nanopatterned antireflection coatings based on sol-gel and soft-imprint technology offer a simple, scalable, and effective solution.
The tunable refractive index and broad angular performance make nanoglass coatings highly versatile.
This technology holds significant promise for enhancing the functionality of various glass-encapsulated optoelectronic devices.