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Related Experiment Video

Updated: Apr 11, 2026

Atomically Traceable Nanostructure Fabrication
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Programmable solid state atom sources for nanofabrication.

Han Han1, Matthias Imboden, Thomas Stark

  • 1Department of Physics, Boston University, Boston, Massachusetts 02215, USA. djb1@bu.edu.

Nanoscale
|June 2, 2015
PubMed
Summary
This summary is machine-generated.

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This study introduces a microelectromechanical systems (MEMS)-based solid-state atom source for precise, controllable atom deposition. This technology enables programmable multi-material atomic layer deposition for advanced nano-fabrication.

Area of Science:

  • Materials Science and Engineering
  • Nanotechnology
  • Microelectromechanical Systems (MEMS)

Background:

  • Traditional atom deposition methods often lack precise control over flux and material type.
  • The need for advanced nano-fabrication techniques drives the development of novel deposition sources.
  • Microscale thermal evaporation offers potential for highly localized and controlled material deposition.

Purpose of the Study:

  • To develop a MEMS-based solid-state atom source for controllable atom deposition.
  • To demonstrate the capability of depositing various materials using this novel source.
  • To explore pulse width modulation techniques for fine-tuning atomic flux and deposition rates.

Main Methods:

  • Utilized a micron-scale silicon plate as a thermal evaporation source within a MEMS device.

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  • Employed pulse width modulation (PWM) techniques with precise voltage and timing control.
  • Demonstrated deposition of multiple elements including indium, silver, gold, copper, iron, aluminum, lead, and tin.

    • Main Results:

    • Achieved controllable atom deposition over eight orders of magnitude (10 atoms/µm² to hundreds of atomic layers).
    • Successfully deposited a range of metallic elements using the micro atom source.
    • Demonstrated precise control over atomic flux and deposition timing via PWM.

    Conclusions:

    • The developed MEMS-based solid-state atom source offers a powerful tool for controlled atomic deposition.
    • Programmable multi-material deposition is achievable by arranging these sources in arrays.
    • This technology complements existing nano-fabrication techniques, enhancing precision and versatility.