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Secondary signal imaging (SSI) electron tomography (SSI-ET): A new three-dimensional metrology for mesoscale

Chang Wan Han1, Volkan Ortalan1

  • 1School of Materials Engineering and Birck Nanotechnology Center, Purdue University, West Lafayette, IN, United States.

Micron (Oxford, England : 1993)
|June 15, 2015
PubMed

Keywords:
Electron tomographyMesoscale materialsSecondary signalsTEM

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