Optical probe for surface and subsurface defects induced by ion bombardment

L D Sun1, M Hohage1, P Zeppenfeld1

  • 1Institute of Experimental Physics, Johannes Kepler University Linz Altenbergerstr. 69, 4040 Linz, Austria.

Physica Status Solidi. Rapid Research Letters : PSS-RRL
|June 20, 2015
PubMed
Summary

Reflectance Difference Spectroscopy (RDS) detects ion-induced defects in surface and subsurface layers. This technique differentiates between surface and subsurface defects by analyzing their unique spectral signatures, enabling in-situ monitoring.