Cavity-Coupled Plasmonic Device with Enhanced Sensitivity and Figure-of-Merit

Using full-wafer processing, we demonstrate a sophisticated nanotechnology for the realization of an ultrahigh sensitive cavity-coupled plasmonic device that combines the advantages of Fabry-Perot microcavities with those of metallic nanostructures. Coupling the plasmonic nanostructures to a Fabry-Perot microcavity creates compound modes, which have the characteristics of both Fabry-Perot and localized surface plasmon resonance (LSPR) modes, boosting the sensitivity and figure-of-merit of the structure. The significant trait of the proposed device is that the sample to be measured is located in the substrate region and is probed by the compound modes. It is demonstrated that the sensitivity of the compound modes is much higher than that of LSPR of plasmonic nanostructures or the pure Fabry-Perot modes of the optical microcavity. The response of the device is also investigated numerically and the agreement between measurements and calculations is excellent. The key features of the device introduced in this work are applicable for the realization of ultrahigh sensitive plasmonic devices for biosensing, optoelectronics, and related technologies.