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    Researchers developed a 16-band spectral imaging sensor using a tunable Fabry-Perot (FP) filter for near-infrared applications. This novel system integrates the FP filter with a single photon avalanche diode (SPAD) for enhanced performance.

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    Area of Science:

    • Optoelectronics
    • Nanotechnology
    • Spectroscopy

    Background:

    • Fabry-Perot (FP) etalons are crucial for spectral filtering.
    • Near-infrared (NIR) imaging requires high-resolution spectral selectivity.
    • Integrating filters with single-photon detectors presents unique challenges.

    Purpose of the Study:

    • To design and fabricate a 16-wavelength selective spectral bands imaging sensor.
    • To achieve wavelength selectivity and tunability in the NIR band (715 nm-915 nm).
    • To combine an ultra-narrow band FP filter with a single photon avalanche diode (SPAD) for the first time.

    Main Methods:

    • Fabrication of a Fabry-Perot structure using SiC/SiO2 distributed Bragg reflector (DBR) multilayers.
    • Tuning the SiO2 interval layer thickness for wavelength selectivity.
    • Integration of the FP filter with a SPAD and development of a reconstruction algorithm.

    Main Results:

    • Demonstration of a 16 wavelength selective spectral bands imaging sensor.
    • High resolution and good uniformity achieved in fabricated FP structures.
    • Successful combination of FP filter with SPAD, with an algorithm to mitigate cross-talk.

    Conclusions:

    • The developed FP spectral imaging sensor offers high performance in the NIR band.
    • The integration of FP filters with SPADs is a novel advancement.
    • This technology enables new applications in hyper-spectral imaging.