16-band single-photon imaging sensor based on Fabry-Perot resonance

We have demonstrated a 16 wavelength selective spectral bands imaging sensor-based Fabry-Perot (FP) structure for use in the near-infrared wavelength band (715 nm-915 nm). The designed structure consists of two symmetric SiC/SiO₂ distributed Bragg reflector (DBR) multilayer structures that sandwich a SiO₂ interval layer. We tuned the thickness of the SiO₂ interval layer to achieve wavelength selectivity and tunability. Fabrication and measurement results based on the FP structure show high resolution and good uniformity. Furthermore, for the first time, we combined the ultra-narrow band FP filter with single photon avalanche diode (SPAD). Finally, a category algorithm to reconstruct the narrow-band filter and improve the cross-talk caused by the overlap of the FP curve is proposed. The combination of FP hyper-spectral filter with SPAD opens the door to several novel applications.