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High resolution quartz flexure accelerometer based on laser self-mixing interferometry.
Cuo Wang1, Xingfei Li1, Ke Kou1
1State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China.
The Review of Scientific Instruments
|July 3, 2015
Summary
This study introduces a novel quartz flexure accelerometer using laser self-mixing interferometry to improve resolution performance. Preliminary results show enhanced bias stability, offering progress for low-cost inertial navigation systems.
Area of Science:
- Inertial Sensing
- Optical Metrology
- Mechanical Engineering
Background:
- Quartz flexure accelerometers are high-precision inertial sensors vital for navigation systems.
- Traditional accelerometers face resolution limitations due to differential capacitance detection methods.
Purpose of the Study:
- To enhance the resolution performance of quartz flexure accelerometers.
- To introduce a novel accelerometer design utilizing laser self-mixing interferometry.
Main Methods:
- A modified quartz flexure accelerometer design was developed.
- Laser self-mixing interferometry was employed to detect the displacement of a quartz pendulous reed.
- An equal and opposite force was generated to maintain the reed's position.
Main Results:
- The improved accelerometer demonstrated a bias stability of 0.75-0.85 μg.
- This represents a notable advancement compared to traditional quartz flexure accelerometers.
- Limitations were identified in laser diode characteristics and multiple reflections.
Conclusions:
- The proposed laser self-mixing interferometry technique offers improved performance for quartz flexure accelerometers.
- The enhanced bias stability shows promise for low-cost inertial navigation applications.
- Further research is needed to overcome current limitations for optimal performance.

