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Updated: Apr 7, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Circuital characterisation of space-charge motion with a time-varying applied bias
Chul Kim1, Eun-Yi Moon2, Jungho Hwang3
11] School of Mechanical Engineering, Yonsei University, Seoul 120-749, Republic of Korea [2] Department of Mechanical Engineering, Kyung Hee University, Yongin 446-701, Republic of Korea.
Abstract:
Understanding the behaviour of space-charge between two electrodes is important for a number of applications. The Shockley-Ramo theorem and equivalent circuit models are useful for this; however, fundamental questions of the microscopic nature of the space-charge remain, including the meaning of capacitance and its evolution into a bulk property. Here we show that the microscopic details of the space-charge in terms of resistance and capacitance evolve in a parallel topology to give the macroscopic behaviour via a charge-based circuit or electric-field-based circuit. We describe two approaches to this problem, both of which are based on energy conservation: the energy-to-current transformation rule, and an energy-equivalence-based definition of capacitance. We identify a significant capacitive current due to the rate of change of the capacitance. Further analysis shows that Shockley-Ramo theorem does not apply with a time-varying applied bias, and an additional electric-field-based current is identified to describe the resulting motion of the space-charge. Our results and approach provide a facile platform for a comprehensive understanding of the behaviour of space-charge between electrodes.
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