Optical heterodyne micro-vibration measurement based on all-fiber acousto-optic frequency shifter

An all-fiber optical heterodyne detection configuration was proposed based on an all-fiber acousto-optic structure, which acted as both frequency shifter and coupler at the same time. The vibration waveform within a frequency range between 1 Hz to 200 kHz of a piezoelectric mirror was measured using this optical heterodyne detection system. The minimal measurable vibration amplitude and resolution are around 6 pm and 1 pm in the region of tens to hundreds of kilohertz, respectively. The configuration has advantages of compact size, high accuracy and non-contact measurement. Moreover, it is of a dynamically adjustable signal-to-noise ratio to adapt different surface with different reflections in the measurement, which will improve the usage efficiency of the light power.