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Chromatic confocal matrix sensor with actuated pinhole arrays.

Matthias Hillenbrand, Robert Weiss, Csaba Endrödy

    Applied Optics
    |July 21, 2015
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    Summary

    We developed a new chromatic confocal matrix sensor for fast 3D object imaging. This sensor enables detailed analysis of multilayer objects and offers improved lateral resolution for advanced material inspection.

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    Area of Science:

    • Optics and Photonics
    • 3D Imaging Technologies
    • Spectroscopy

    Background:

    • Chromatic confocal microscopy is a key technique for 3D surface profiling.
    • Existing methods often lack the speed and resolution for complex object analysis.
    • Multilayer object characterization requires advanced spectroscopic capabilities.

    Purpose of the Study:

    • To introduce two novel chromatic confocal matrix sensor designs for snapshot 3D acquisition.
    • To enable parallelized hyperspectral analysis of lateral measurement points.
    • To enhance lateral resolution through micromechanical actuation.

    Main Methods:

    • Development of two sensor versions: separate illumination/detection pinholes and a double-pass single pinhole array.
    • Integration of a hyperspectral detection module for parallel spectrometric evaluation.
    • Utilization of micromechanical actuators to adjust pinhole array positions for resolution enhancement.

    Main Results:

    • Demonstration of parallelized spectrometric evaluation across multiple lateral channels.
    • Successful analysis of multilayer objects enabled by hyperspectral capabilities.
    • Quantitative evaluation of the chromatic confocal module and proof-of-principle experiments with the full sensor system.

    Conclusions:

    • The developed chromatic confocal matrix sensors offer a powerful tool for snapshot 3D imaging.
    • The hyperspectral detection enables detailed analysis of complex multilayer structures.
    • Micromechanical actuators provide a pathway to significantly improve lateral resolution in confocal microscopy.