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Calibrating system errors of large scale three-dimensional profile measurement instruments by subaperture stitching
Applied Optics
|July 21, 2015
Summary
This study introduces a subaperture stitching method to calibrate large-scale 3D profile measurement instruments (PMIs). This calibration improves the accuracy of 3D surface profiles for various optical components.
Area of Science:
- Metrology and Optical Engineering
- Precision Measurement Science
Background:
- Large-scale 3D profile measurement instruments (PMIs) require accurate calibration for precise surface characterization.
- Systematic errors in PMIs can significantly impact the fidelity of measured 3D surface profiles.
Purpose of the Study:
- To develop and validate a subaperture stitching method for calibrating system errors in large-scale PMIs.
- To enhance the measurement accuracy and reliability of 3D surface profiles for optical manufacturing.
Main Methods:
- Utilizing a subaperture stitching algorithm (sequential or simultaneous) to calibrate PMIs.
- Measuring a standard flat sample at multiple positions with a length gauge.
- Minimizing data inconsistencies in overlapped areas during stitching.
Main Results:
- Successfully calibrated system errors in ∼2-meter scale PMIs.
- Demonstrated the compensation of measurement results for flats, spheres, and aspheres.
- Validated the method by measuring a Φ1070 mm aspheric mirror with improved accuracy.
Conclusions:
- The subaperture stitching method effectively calibrates system errors in large-scale PMIs.
- This calibration enhances the accuracy of 3D surface profile measurements.
- Reliable 3D surface data guides critical optical manufacturing processes like grinding, lapping, and polishing.
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