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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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Investigating the Fundamentals of Molecular Depth Profiling Using Strong-field Photoionization of Sputtered Neutrals

D Willingham1, D A Brenes1, N Winograd1

  • 1Department of Chemistry, Pennsylvania State University, 104 Chemistry Building, University Park, Pennsylvania 16802.

Surface and Interface Analysis : SIA
|August 14, 2015
PubMed
Abstract

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