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A Microgripper with a Post-Assembly Self-Locking Mechanism.

Guangmin Yuan1, Weizheng Yuan2, Yongcun Hao3

  • 1Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China. yuangm@nwpu.edu.cn.

Sensors (Basel, Switzerland)
|August 20, 2015
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Summary

This study introduces an electrostatically actuated microgripper with a self-locking mechanism. It grips objects from 0-100 μm without continuous power, reducing damage to delicate samples.

Keywords:
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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Robotics
  • Nanotechnology

Background:

  • Microgrippers are essential for manipulating microscale objects.
  • Existing microgrippers often require continuous power, leading to potential damage.
  • A need exists for microgrippers with efficient and stable gripping mechanisms.

Purpose of the Study:

  • To design and fabricate a novel electrostatically actuated microgripper.
  • To incorporate a post-assembly self-locking mechanism for sustained gripping.
  • To enable microgripping of objects ranging from 0 to 100 μm without continuous power.

Main Methods:

  • Utilized rotary comb actuators for microgripper arm actuation.
  • Implemented a post-assembly mechanism driven by elastic deformation and static electricity for self-locking.
  • Fabricated the microgripper using Silicon-On-Insulator (SOI) wafer technology with a 30 μm structural layer.

Main Results:

  • Achieved a displacement of 100 μm with a driving voltage of 33 V.
  • Successfully demonstrated self-locking and releasing actions of the microgripper arms.
  • Gripped a metal wire with a diameter of approximately 1.6 mil, validating the mechanism's feasibility.

Conclusions:

  • The developed microgripper offers a stable and low-power solution for micro-object manipulation.
  • The post-assembly self-locking mechanism significantly reduces external driving signal effects and potential damage.
  • This technology holds promise for applications in micro-assembly, biological sample handling, and micro-robotics.