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High-fidelity AFM scanning stage based on multilayer ceramic capacitors

Jian Chen1, Lian Sheng Zhang1, Zhi Hua Feng1

  • 1Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui, China.

Scanning
|September 15, 2015
PubMed

Keywords:
atomic force microscopehysteresislinearitymultilayer ceramic capacitortripod scanning stage

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