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Updated: Apr 3, 2026
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Scanning-probe Single-electron Capacitance Spectroscopy
Published on: July 30, 2013
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High-fidelity AFM scanning stage based on multilayer ceramic capacitors
Jian Chen1, Lian Sheng Zhang1, Zhi Hua Feng1
1Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui, China.
Scanning
|September 15, 2015
Summary
Multilayer ceramic capacitors (MLCCs) were used as lateral scanners in a tripod scanning stage for nano-positioning. This novel application achieved high-fidelity imaging in atomic force microscopy (AFM).
Area of Science:
- Materials Science
- Nanotechnology
- Mechanical Engineering
Background:
- Multilayer ceramic capacitors (MLCCs) exhibit promising micro-actuating properties.
- Nano-positioning applications require precise and stable scanning stages.
Purpose of the Study:
- To employ MLCCs as lateral scanners for a tripod scanning stage.
- To evaluate the performance of an MLCC-based scanning stage in atomic force microscopy (AFM).
Main Methods:
- Developed a tripod scanning stage utilizing MLCCs as lateral scanners.
- Characterized the hysteresis and nonlinearity of the MLCC-based scanners under open-loop voltage drive.
- Integrated the scanning stage into a commercial AFM for imaging experiments.
Main Results:
- MLCC-based lateral scanners demonstrated hysteresis below 1.5% and nonlinearity less than 2%.
- The developed scanning stage enabled high-fidelity imaging when integrated into an AFM.
- The system proved effective for nano-positioning tasks.
Conclusions:
- MLCCs are suitable candidates for developing high-performance nano-positioning scanners.
- The MLCC-based scanning stage offers a cost-effective and efficient solution for AFM applications.
- This technology advances the capabilities of scanning probe microscopy.
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