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Shear on the Horizontal Face of a Beam Element

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Analysis of lateral shearing interferometry without self-imaging limitations.

Jie Li, Feng Tang, Xiangzhao Wang

|September 26, 2015

Summary

This summary is machine-generated.

A new randomly encoded hybrid grating (REHG) offers superior performance in lateral shearing interferometry compared to modified Hartmann masks (MHM). REHG provides better fringe contrast, spectral bandwidth, and wavefront accuracy without self-imaging limitations.

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Area of Science:

Optical metrology
Wavefront sensing

Background:

Lateral shearing interferometry enables interferogram generation at any distance.
Modified Hartmann masks (MHM) and randomly encoded hybrid gratings (REHG) are used for this purpose.

Purpose of the Study:

To analyze and compare MHM and REHG in lateral shearing interferometry.
To evaluate diffraction orders, fringe contrast, spectral bandwidth, and wavefront accuracy.

Main Methods:

Numerical simulations were employed to compare MHM and REHG.
Analysis included diffraction orders, carrier fringe contrast, spectral bandwidth, and wavefront measurement accuracy.

Main Results:

REHG demonstrated superior performance over MHM in fringe contrast, spectral bandwidth, and wavefront accuracy.
REHG exhibits invariant fringe contrast along the propagation axis within a specific phase step range.
Wavefront reconstruction error from higher diffraction orders is negligible for REHG.

Conclusions:

REHG is a more effective component for lateral shearing interferometry than MHM.
Optimal quantization of REHG (M=2, N≥5) meets measurement accuracy requirements.