Microwave Band-Pass Filter with Aerosol-Deposited Al2O3-Polytetrafluoroethylene Composite Thick Films

Fabrication of microwave band-pass filter with coplanar waveguide with ground structure was realized by employing Al2O3-polytetrafluoroethylene (Al2O3-PTFE) composite thick films for integrated substrates produced by aerosol deposition (AD). In order to predict the performance of the band-pass filter, 3-D electromagnetic simulations were performed by high-frequency structure analysis. The thick Al2O3-PTFE composite films prepared by the AD process had submicron-sized Al2O3 crystallites due to the shock-absorbing effect of PTFE during the film growth. The thick films were characterized by X-ray diffraction and scanning electron microscopy. The Cu transmission lines with the thickness of 300 nm were deposited by electron-beam evaporation to form the band-pass filter. The fabricated band-pass filter showed similar characteristics to the simulation results. The insertion loss and resonance frequency were 9.5 dB and 2.3 GHz, respectively.