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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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Investigation of the depth-profiling capabilities of the Storing Matter technique

B Kasel1, T Wirtz1

  • 1Advanced Instrumentation for Ion Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science Technology (LIST), 41 rue du Brill, Belvaux, L-4422, Luxembourg.

Journal of Mass Spectrometry : JMS
|October 13, 2015
PubMed

Keywords:
SIMSStoring Matterdepth profilingmatrix effectquantificationsecondary ion mass spectrometry

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