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Fully integrated low-noise readout circuit with automatic offset cancellation loop for capacitive microsensors.

Haryong Song¹, Yunjong Park², Hyungseup Kim³

¹Department of Electronics, Chungnam National University, Daejeon 305-764, Korea. zealshr@cnu.ac.kr.

Sensors (Basel, Switzerland)

|October 17, 2015

Summary

This study introduces a low-noise readout circuit for capacitive microsensors that automatically cancels parasitic capacitance issues. The automatic offset cancellation loop (AOCL) effectively removes unwanted offsets, improving sensor accuracy.

Keywords:

automatic offset cancellation loop (AOCL)capacitive microsensor capacitive sensing circuit correlated double sampling (CDS)

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Area of Science:

Electrical Engineering
Micro-electromechanical Systems (MEMS)
Sensor Technology

Background:

Capacitive sensing is prevalent in microsensors but is significantly hindered by parasitic capacitance.
Parasitic capacitances and process variations lead to output offsets in capacitive sensing chains.
Existing methods for offset cancellation can be complex and time-consuming.

Purpose of the Study:

To present a fully integrated low-noise readout circuit for capacitive microsensors.
To address and mitigate the severe parasitic capacitance problems affecting microsensor accuracy.
To implement an automatic offset cancellation loop (AOCL) for enhanced performance.

Main Methods:

Developed a novel automatic offset cancellation loop (AOCL) integrated into a readout circuit.
Utilized an R-2R digital-to-analog converter, charge-transfer switches, and a charge-storing capacitor for charge-domain fine calibration.
Employed a successive approximation register (SAR) logic with a binary-search algorithm for offset cancellation.

Main Results:

The integrated circuit, fabricated in a 0.18 μm CMOS process, achieved low noise and automatic offset cancellation.
The AOCL successfully cancelled input parasitic capacitances ranging from -250 fF to 250 fF.
The calibration time was demonstrated to be less than 10 ms with a power consumption of 220 μW.

Conclusions:

The proposed readout circuit effectively eliminates parasitic capacitance-induced offsets in capacitive microsensors.
The AOCL provides a robust and efficient solution for improving the accuracy and reliability of capacitive sensing systems.
This integrated solution offers a significant advancement for low-power, high-performance microsensor applications.