You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Mar 31, 2026

Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator
Published on: January 28, 2019
A new algorithm quantitatively extracts object wave amplitude and phase from varied imaging conditions. This method, applicable to Extreme Ultraviolet Lithography (EUV) mask defect analysis, improves quantitative phase imaging.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: