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X-ray-induced Cu deposition and patterning on insulators at room temperature
Pei-Cheng Hsu1, Yu-Sheng Chen1, Yeukuang Hwu1
1Institute of Physics, Academia Sinica, Nankang, Taipei 115, Taiwan.
Abstract:
X-ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO2/Si and photoresists like PMMA and SU-8. The process is suitable for patterning and the products can be used as seeds for electroplating of thicker overlayers.
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