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Analyzing Longitudinal Magnetoresistance Asymmetry to Quantify Doping Gradients: Generalization of the van der Pauw
Wang Zhou1, H M Yoo1, S Prabhu-Gaunkar1
1Electrical Engineering and Computer Science, Northwestern University, Evanston, Illinois 60208, USA.
Longitudinal magnetoresistance asymmetry quantifies electron density gradients in semiconductor wafers. This method generalizes the van der Pauw technique for precise material characterization.
Area of Science:
- Condensed Matter Physics
- Materials Science
- Semiconductor Physics
Background:
- Nonuniform doping density in semiconductor samples can lead to longitudinal magnetoresistance asymmetry (LMA).
- LMA is observed in both quantum and classical (Drude) limits under specific conditions.
- Existing methods may not precisely quantify the electron density gradient.
Purpose of the Study:
- To quantitatively deduce the electron density gradient from LMA in the Drude regime.
- To establish a generalized van der Pauw method for density gradient quantification.
- To validate the LMA-derived gradients against local density measurements.
Main Methods:
- Analysis of the current stream function within the van der Pauw measurement geometry.
- Measurement of longitudinal magnetoresistance asymmetry (LMA) under varying magnetic fields.
- Calibration of local carrier densities across a semiconductor wafer.
Main Results:
- The electron density gradient can be quantitatively determined from LMA in the Drude regime.
- The derived gradients show agreement with interpolated local densities.
- The study establishes a novel application of LMA for material characterization.
Conclusions:
- Longitudinal magnetoresistance asymmetry provides a quantitative measure of electron density gradients.
- The van der Pauw method is extended to accurately profile doping nonuniformities.
- This technique offers a valuable tool for semiconductor material analysis and quality control.
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