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Cell Patterning on Photolithographically Defined Parylene-C: SiO2 Substrates
Published on: March 7, 2014
Robust surface patterning by parylene-reinforced breath figures: An enabling tool for liquid crystal microcell arrays
Francesco Galeotti1, Lutz Hartmann2, Chiara Botta1
1CNR-Istituto per lo Studio delle Macromolecole, Via Bassini 15, 20133 Milan, Italy.
Abstract:
We propose a novel fabrication method for realizing robust and solvent resistant honeycomb films by combining parylene deposition with the polymer auto-organization phenomenon leading to breath figures. Parylene CVD process is suitable for producing a conformal protective layer on the honeycomb surface, reinforcing and stabilizing this structure. We demonstrate that the stabilized porous films can be filled with chloroform solution of fluorescent materials, without losing the integrity of their microstructure. In addition, liquid crystals can be encapsulated inside the patterned surface between two layers of parylene, showing interesting organization features dictated by the spatial constrains. This is the first reported application of breath figures with liquid crystals, suggesting a new approach for the development of honeycomb-based liquid crystal cells for flexible displays.

