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Advancing FIB assisted 3D EBSD using a static sample setup.

Julien Guyon1, Nathalie Gey1, Daniel Goran2

  • 1Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux, LEM3, CNRS ISGMP, Université de Lorraine, F-57045 Metz Cedex 01, France; Laboratory of Excellence on Design of Alloy Metals for low-mAss Structures ('LabEx DAMAS'), Université de Lorraine, F-57045 Metz Cedex 01, France.

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Summary

A novel static 3D Electron Backscatter Diffraction (EBSD) data collection method was developed. This technique enhances data quality and throughput for advanced material characterization without sample movement.

Keywords:
3D EBSDFIB–SEMGrain boundaryStatic setupTomography

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Area of Science:

  • Materials Science
  • Crystallography
  • Microscopy

Background:

  • 3D Electron Backscatter Diffraction (EBSD) is crucial for materials science.
  • Conventional methods often involve sample movement, leading to data inaccuracies.
  • Improving 3D EBSD data quality and throughput is an ongoing challenge.

Purpose of the Study:

  • To develop and validate a new static 3D EBSD data collection setup.
  • To eliminate stage or sample movements during focused ion beam-scanning electron microscopy (FIB-SEM) serial sectioning.
  • To assess the impact of the static setup on data quality and throughput.

Main Methods:

  • Implementation of a static data collection mode within a FIB-SEM system.
  • Utilizing a conventional FIB-SEM without requiring stage or sample manipulation between milling and mapping.
  • Experimental validation on a coherent twin boundary in an INCONEL sample.

Main Results:

  • Demonstrated significant advantages in data throughput compared to dynamic methods.
  • Achieved superior slice alignment for improved 3D reconstruction.
  • Showcased enhanced orientation precision in 3D space, crucial for reliable characterization.

Conclusions:

  • The developed static 3D EBSD setup offers improved data quality and throughput.
  • Eliminating sample movement is key to better slice alignment and orientation precision.
  • This method is vital for reliable 3D grain boundary characterization in materials.