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Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror.

Hao Zhang1,2, Dacheng Xu3, Xiaoyang Zhang4

  • 1School of Electronic and Information Engineering, Soochow University, Suzhou 215006, China. zhanghao8.sz@jsoa.net.

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Summary

This study investigates Microelectromechanical Systems (MEMS) mirror actuation, developing a model to predict performance and an open-loop control method. This simplifies control systems by eliminating real-time feedback for precise angular scanning.

Keywords:
MEMS mirrorelectrothermal actuatormodel based open-loop controlstatic deviation

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Area of Science:

  • Microelectromechanical Systems (MEMS) Engineering
  • Optical Systems
  • Control Systems

Background:

  • Microelectromechanical Systems (MEMS) mirrors are crucial components in optical scanning probes and switches.
  • Process variations in MEMS fabrication can lead to significant differences in actuator performance.
  • Existing control methods may require complex real-time feedback, increasing system complexity.

Purpose of the Study:

  • To investigate the actuation behavior of a two-axis electrothermal MEMS mirror.
  • To develop a predictive mathematical model for MEMS mirror actuation.
  • To establish an open-loop control method for accurate angular scanning.

Main Methods:

  • Developed a four-input, four-output mathematical model accounting for thermal-mechanical coupling and actuator variations.
  • Monitored vertical positions of actuator ends.
  • Implemented and experimentally verified a model-based open-loop control strategy.

Main Results:

  • Identified actuation characteristic differences up to 4.0% among four actuators, causing an average angular scan error of 0.03°.
  • The developed mathematical model accurately predicts MEMS mirror actuation behavior.
  • The open-loop control method achieved precise angular scanning without real-time feedback.

Conclusions:

  • A model-based open-loop control method effectively compensates for MEMS mirror actuator variations.
  • This approach simplifies MEMS control systems by removing the need for real-time position monitoring.
  • The developed control strategy enables accurate and simplified actuation of MEMS mirrors.