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Design of a Micro-Electro Mechanical System Quad Mass Gyroscope with Compliant Mechanical Amplification

Jingchuan Zhou1,2, Dacheng Xu3, Xinxin Li1,2

  • 1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.

Micromachines
|January 23, 2024
PubMed

Keywords:
MEMS gyroscopefinite element analysislarge mechanical sensitivitymechanical amplificationquadruple mass gyroscope

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