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Related Concept Videos

Atomic Force Microscopy01:08

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Quantitative Hardness Measurement by Instrumented AFM-indentation
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Tip characterization method using multi-feature characterizer for CD-AFM.

Ndubuisi G Orji1, Hiroshi Itoh2, Chumei Wang2

  • 1Engineering Physics Division, National Institute of Standards and Technology, Gaithersburg, MD, United States.

Ultramicroscopy
|January 1, 2016
PubMed
Summary
This summary is machine-generated.

A new atomic force microscopy (AFM) tip characterizer accurately measures critical dimension AFM (CD-AFM) tips. This tool provides 1nm consistency for nanoscale metrology, improving feature dimension accuracy.

Keywords:
Critical dimension atomic force microscopeTip characterizerTip dilation

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Area of Science:

  • Nanotechnology
  • Metrology
  • Surface Science

Background:

  • Atomic Force Microscopy (AFM) tip geometry is a primary source of uncertainty in nanoscale measurements.
  • Geometric dilation in AFM images complicates accurate determination of feature dimensions, especially for high aspect ratio features.
  • Precise knowledge of AFM tip dimensions is crucial for reliable nanoscale metrology.

Purpose of the Study:

  • To evaluate a novel AFM tip characterizer for critical dimension AFM (CD-AFM) tips.
  • To assess the characterizer's capability in measuring high aspect ratio features.
  • To validate the integrated nanoscale length reference within the characterizer.

Main Methods:

  • Utilized a new comb-shaped AFM tip characterizer with integrated gratings.
  • Applied the characterizer to CD-AFM tips used for high aspect ratio features.
  • Employed a simulation method to define the characterizer's measurable tip size and shape range.
  • Validated the integrated length standard using displacement interferometry.

Main Results:

  • The characterizer demonstrated 1nm consistency with established CD-AFM metrology methods for non-re-entrant features.
  • The integrated length standard showed uniformity better than 0.75% via displacement interferometry.
  • The characterizer effectively measures critical dimension AFM tips for high aspect ratio features.

Conclusions:

  • The new AFM tip characterizer offers a precise and efficient method for determining tip dimensions.
  • The integrated nanoscale length reference provides a highly accurate and SI-traceable lateral scale.
  • This characterizer significantly enhances the reliability of nanoscale measurements in AFM metrology.