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Related Concept Videos

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The AFM Probe
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Wear comparison of critical dimension-atomic force microscopy tips.

Ndubuisi G Orji1, Ronald G Dixson1, Ernesto Lopez2

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20850, USA.

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|December 11, 2020
PubMed
Summary

Electron beam deposited tips significantly reduce wear and extend lifetime for critical dimension atomic force microscopy (CD-AFM), improving measurement accuracy and lowering costs.

Keywords:
critical dimension atomic force microscopydiamond like carbonelectron beam depositionnanometrologytip wear

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Metrology

Background:

  • Nanoscale wear impacts atomic force microscopy (AFM) measurements across various applications, including process control and nanoelectronics.
  • Reducing AFM tip wear is crucial for maintaining measurement accuracy and reliability.
  • Limited research exists on tip wear specifically for critical dimension AFM (CD-AFM), despite its direct effect on dimensional measurements.

Purpose of the Study:

  • To investigate the wear performance of electron beam deposited (EBD) CD-AFM tips.
  • To compare the wear rate and tip lifetime of EBD tips against conventional silicon-based CD-AFM tips.
  • To understand the fundamental aspects of CD-AFM tip wear to enhance measurement accuracy.

Main Methods:

  • Utilized a continuous scanning strategy to evaluate tip wear.
  • Quantified wear rates and determined tip lifetimes for EBD CD-AFM tips.
  • Performed comparative analysis with silicon-based CD-AFM tips.

Main Results:

  • Electron beam deposited CD-AFM tips demonstrated a tip lifetime improvement of up to five times compared to silicon tips.
  • Wear rates for EBD tips were reduced by more than 17 times.
  • These findings indicate significantly enhanced durability and reduced degradation of EBD tips.

Conclusions:

  • Electron beam deposited tips offer a substantial improvement in wear resistance for CD-AFM applications.
  • Reduced wear rates translate to decreased measurement variability and potentially lower operational costs.
  • The study provides essential insights into CD-AFM tip wear, paving the way for more robust nanoscale metrology.