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D B Zolotukhin1, A V Tyunkov1, Yu G Yushkov1
1Tomsk State University of Control Systems and Radioelectronics, 40 Lenin Ave., Tomsk 634050, Russia.
A modified residual gas analyzer (RGA) enhances electron beam plasma research at forevacuum pressures. Optimization of its new ionizer unit improved ion current measurements for various gases.
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