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Updated: Mar 28, 2026

Building Langmuir Probes and Emissive Probes for Plasma Potential Measurements in Low Pressure, Low Temperature Plasmas
Published on: May 25, 2021
E × B probe measurements in molecular and electronegative plasmas
D Renaud1, D Gerst1, S Mazouffre1
1ICARE, CNRS, 1C Av. de la Recherche Scientifique, 45071 Orléans, France.
A new E × B probe effectively filters ions, identifying both positive and negative species in plasma. This diagnostic tool accurately measures ion velocity and plasma composition, even with complex molecular fragments from SF6.
Area of Science:
- Plasma Physics
- Ion Source Diagnostics
Background:
- Electronegative gases like SF6 are used in plasma propulsion.
- Diagnosing ion species in such plasmas is challenging due to molecular fragments.
Purpose of the Study:
- To design, build, calibrate, and utilize a compact E × B probe.
- To characterize ion species in the PEGASES ion source using SF6.
Main Methods:
- Development of a compact E × B probe functioning as a velocity or mass filter.
- Performing measurements in the discharge and beam of the PEGASES inductively coupled radio-frequency source.
- Utilizing SF6 as the electronegative gas for experiments.
Main Results:
- The calibrated E × B probe accurately determines ion velocity and plasma composition.
- The probe successfully detects both positive and negative ions.
- SF6 plasma yields diverse positive ions, while the beam contains only F(-) and SF6(-) negative ions, matching simulations.
Conclusions:
- The E × B probe is a versatile diagnostic tool for complex ion plasmas.
- It enables precise measurement of ion velocity and composition, including negative ions.
- Experimental results with SF6 align with theoretical predictions.
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