Note: High temperature pressure sensor for petroleum well based on silicon over insulator
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Updated: Mar 28, 2026

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
Published on: January 7, 2019
Bian Tian1, Hanyue Liu1, Ning Yang1
1State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China.
Abstract:
In order to meet the requirements in petroleum well, a novel structure of high temperature pressure sensor based on the silicon over insulator (SOI) technology is proposed in this paper. The SOI sensor chip is bonded with a glass ring by electrostatic bonding. By controlling the inner diameter of the glass ring, the size of the circle membrane is obtained precisely. And the detailed parameters of the structure are established through analysis. Then, the sensor is fabricated. The test results show that this type sensor has high sensitivity and accuracy. It is able to measure at the temperature up to 180 °C and the measuring range is 60 MPa. Moreover, the results we got are closer to the actual situation.
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