Note: High temperature pressure sensor for petroleum well based on silicon over insulator

Area of Science:

• Materials Science
• Sensor Technology
• Petroleum Engineering

Background:

• Petroleum well operations require robust sensors capable of withstanding extreme temperatures and pressures.
• Existing sensor technologies may not meet the stringent requirements for high-temperature, high-pressure environments.

Purpose of the Study:

• To propose and fabricate a novel high-temperature pressure sensor utilizing silicon-on-insulator (SOI) technology.
• To precisely control sensor membrane dimensions for enhanced performance.

Main Methods:

• Developed a novel sensor structure based on SOI technology.
• Employed electrostatic bonding to integrate the SOI sensor chip with a glass ring.
• Precisely controlled the circular membrane size by adjusting the glass ring's inner diameter.
• Analyzed detailed structural parameters and fabricated the sensor.

Main Results:

• The fabricated sensor demonstrates high sensitivity and accuracy.
• The sensor is operational at temperatures up to 180°C.
• The sensor has a measuring range of 60 MPa.
• Experimental results closely align with theoretical predictions and actual conditions.

Conclusions:

• The novel SOI-based high-temperature pressure sensor meets the demanding requirements of petroleum well applications.
• The precise control over membrane size through electrostatic bonding ensures high performance.
• The sensor offers a reliable solution for high-pressure, high-temperature measurements.