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Published on: January 7, 2019
A heat flux sensor with both fast response and high sensitivity
Le Li1, Bian Tian2, Yanzhong Chen1
1State Key Laboratory for Mechanical Manufacturing Systems Engineering, The School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.
Microsystems & Nanoengineering
|July 21, 2026
Summary
This study introduces a novel heat flux sensor with a hexagonal thermopile array, achieving high sensitivity and fast response times for accurate heat transfer measurements.
Area of Science:
- Thermodynamics and Heat Transfer
- Sensor Technology
- Materials Science
Background:
- Heat flux sensors are crucial for heat transfer analysis.
- Existing sensors face limitations in balancing sensitivity and response time due to thermal resistance and junction count.
- High-accuracy, rapid heat flux measurement remains a challenge.
Purpose of the Study:
- To design and develop a novel heat flux sensor with enhanced sensitivity and rapid response.
- To overcome the limitations of conventional heat flux sensors.
- To enable accurate measurement of high-temperature and transient heat transfer processes.
Main Methods:
- Designed a thermopile array utilizing a hexagonal dense arrangement to maximize junctions within a limited area.
- Incorporated films with distinct functions at hot and cold junctions to amplify temperature differences.
- Conducted tests to evaluate sensor performance across various heat flux ranges and conditions.
Main Results:
- Achieved a coefficient of determination (R²) > 0.999 for quadratic fits between sensor output and heat flux (0-207 kW/m²).
- Demonstrated a maximum heat flux sensitivity of 91.13 μV/(kW/m²) in the linear operating range (114-201 kW/m²).
- Exhibited response times faster than 2.85 ms under varying laser powers and durations, with good responses to respiration, flame, and hot air.
Conclusions:
- The developed heat flux sensor effectively combines high sensitivity and fast response times.
- The hexagonal thermopile array and differential film design enhance measurement accuracy and speed.
- The sensor shows significant potential for applications involving high-temperature and rapidly changing heat transfer measurements.

