High-stability flexible thin-film temperature sensor using MWCNTs-toughened Peano structure

Area of Science:

• Materials Science
• Nanotechnology
• Sensor Technology

Background:

• Flexible thin-film temperature sensors offer conformal surface temperature measurement.
• Sensor performance degrades due to installation deformation and testing stress.
• Existing sensors lack stability under mechanical strain.

Purpose of the Study:

• To develop a stable and reliable flexible thin-film temperature sensor.
• To reduce internal stress in thin-film sensors using Peano structures.
• To enhance thermoelectric properties with MWCNT doping.

Main Methods:

• Utilized Peano structure for thin-film design optimization to minimize internal stress.
• Doped Indium oxide (In2O3) with multi-walled carbon nanotubes (MWCNTs).
• Optimized co-conformal deposition parameters for a powder-fiber staggered adhesive thin-film microstructure.

Main Results:

• Developed a thermocouple-type flexible thin-film temperature sensor.
• The sensor demonstrates high stability and reliability, unaffected by force or deformation.
• Achieved reduced internal stress and enhanced thermoelectric properties.

Conclusions:

• The Peano structure and MWCNT doping effectively enhance sensor stability and reliability.
• The developed sensor is suitable for demanding contact and non-contact temperature measurements.
• This technology shows promise for applications involving mechanical stress and deformation.