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Updated: Mar 27, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
A 1.04µW wireless integrated MEMS interface in UMC 0.18µm CMOS
Abstract:
This paper presents an ultra low-power integrated interface for capacitive and resistive MEMS and sensors, intended for use in biomedical applications. The interface encodes the sensed data in the time between transmitted UWB pulses: this reduces the number of transmitted bits and benefits the power consumption. The interface was designed and fabricated in the UMC 0.18μm CMOS process: the power consumption of the system was measured to be 1.04μW at a sample rate of 37Hz.
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