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Updated: Mar 26, 2026

A Polymer-based Piezoelectric Vibration Energy Harvester with a 3D Meshed-Core Structure
Published on: February 20, 2019
Note: A valve-type piezoelectric reciprocating pump with secondary resonant vibrator
Yu Ting Ma1, Ce Wang1, Xin Tao Yan1
1CAS Key Lab of Bio-Medical Diagnostics, Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou, Jiangsu 215163, China.
This study introduces a novel piezoelectric diaphragm pump with a secondary resonant vibrator. This design enhances frequency compatibility, achieving a flow rate of 13.94 ml/min at 6 Hz.
Area of Science:
- Mechanical Engineering
- Materials Science
- Electrical Engineering
Background:
- Piezoelectric diaphragm pumps offer advantages in microfluidics and medical devices.
- Frequency incompatibility between piezoelectric actuators and check valves limits pump efficiency.
- Secondary resonant structures can mitigate these frequency mismatches.
Purpose of the Study:
- To introduce a novel valve-type piezoelectric diaphragm pump utilizing a secondary resonant vibrator.
- To address the frequency incompatibility issue in piezoelectric diaphragm pumps.
- To investigate the performance of the pump under varying operational conditions.
Main Methods:
- Design and fabrication of a piezoelectric diaphragm pump with a dual-stage vibrator system.
- Development of a frequency-tracking control circuit.
- Experimental analysis of vibration displacement and flow rate against driving voltage, frequency, and backpressure.
Main Results:
- The secondary resonant vibrator effectively coordinates frequency differences between piezoelectric elements and check valves.
- Experimental results demonstrate pump performance under various conditions.
- A prototype achieved a flow rate of 13.94 ml/min at a secondary resonant frequency of 6 Hz with a driving voltage of 712 Vpp.
Conclusions:
- The proposed secondary resonant vibrator design is effective in enhancing piezoelectric diaphragm pump performance.
- The frequency-tracking control circuit ensures stable operation.
- This technology shows promise for applications requiring precise fluid handling.
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