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Rapid aberration measurement with pixelated detectors
A R Lupini1,2, M Chi3, S Jesse3,2
1Materials Science & Technology Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee, U.S.A.
Journal of Microscopy
|February 3, 2016
Summary
This study introduces a new, fast method for measuring lens aberrations in scanning transmission electron microscopes. This technique aids in tuning aberration correctors for improved electron microscopy automation.
Area of Science:
- Electron Microscopy
- Optical Physics
- Materials Science
Background:
- Aberration correction is crucial for high-resolution scanning transmission electron microscopy (STEM).
- Accurate measurement of lens aberrations is necessary for tuning aberration correctors.
- Existing methods for aberration measurement can be time-consuming.
Purpose of the Study:
- To develop a rapid and accurate method for measuring lens aberrations in STEM.
- To enable faster alignment and tuning of aberration correctors.
- To advance the automation of electron microscopy.
Main Methods:
- Acquisition of a 4D dataset using a pixelated detector.
- Implementation of a novel aberration measurement technique.
- Comparison with existing aberration measurement procedures.
Main Results:
- The developed method achieves accuracy comparable to existing techniques.
- The procedure can be performed in a matter of seconds.
- The method is extensible to aberrations of arbitrary order.
Conclusions:
- This technique offers a significant speed improvement for aberration measurement.
- It represents a key advancement towards automated electron microscopy.
- The method facilitates quicker and more efficient STEM corrector tuning.
