Quantitative secondary electron imaging for work function extraction at atomic level and layer identification of...

Area of Science:

• Materials Science
• Surface Science
• Nanotechnology

Background:

• Two-dimensional (2D) materials exhibit layer-dependent work functions crucial for device performance.
• Existing detection techniques lack the required high throughput and spatial resolution for accurate work function evaluation.

Purpose of the Study:

• To develop and implement a novel, high-throughput, and high-spatial-resolution quantitative analytical technique for extracting the work function of 2D materials.
• To enable precise characterization of graphene's layer-dependent work function.

Main Methods:

• Utilized a scanning electron microscope (SEM) for quantitative analysis.
• Employed secondary electron contrast imaging to extract work function information.
• Achieved nanometer-resolved layer information for precise measurements.

Main Results:

• Successfully developed and implemented a quantitative SEM-based technique for work function extraction.
• Demonstrated the technique's capability to measure work function variations between graphene layers with high precision (<10 meV).
• Obtained nanometer-resolved layer information, revealing detailed work function variations.

Conclusions:

• The developed SEM technique offers a revolutionary approach for accurate and high-throughput work function measurement in 2D materials.
• This technique is expected to significantly benefit researchers across various fields requiring precise material characterization.
• The nanometer-resolved layer information provides unprecedented insight into the electronic properties of layered materials.