Maskless, High-Precision, Persistent, and Extreme Wetting-Contrast Patterning in an Environmental Scanning Electron

Ville Liimatainen1, Ali Shah2, Leena-Sisko Johansson3

  • 1Department of Electrical Engineering and Automation, School of Electrical Engineering, Aalto University, Otaniementie 17, Espoo, 02150, Finland.

Summary

A novel electron beam method creates precise superhydrophilic-superhydrophobic patterns. This technique, using an environmental scanning electron microscope (ESEM), achieves high contrast wetting for advanced material studies.

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